Item

Parameter

Rotary table

Bearing Type

Gas bearing

Rotation accuracy

(0.05+6H/10000)μm

Rotating speed

6rpm

Adjust table diameter

150mm

Table loading capacity

15kg

Rotation diameter

320mm

Max measure diameter

200mm

Min measure inner diameter

1mm probe (Optional)

Column (Z-axis )

Column transverse travel

220mm

Max detection depth

100mm (min inner diameter): 30mm)

horizontal arm (X-axis)

Horizontal movement

100mm

Protrusion amount

25mm

Detector

Acquisition device

Circle grating

Circumference of sampling points

4096 points

Sensor type

Inductive Sensor

Sensor range

±300μm

Sensor resolution

0.01μm