Item

Parameter

Rotary table

Bearing Type

Gas bearing

Rotation accuracy

(0.04+6H/10000)μm

Rotating speed

4,6,8,10rpm

Adjust table diameter

180mm

Table loading capacity

25kg

Rotation diameter

560mm

Max measure diameter

280mm

Min measure inner diameter

1mm probe (Optional)

Column (Z-axis )

Column transverse travel

320mm

Max detection depth

100mm(min inner diameter: 30mm)

Column straightness

0.3μm/300mm

Column and spindle parallelism

1.5μm/300mm

horizontal arm (X-axis)

Horizontal movement

165mm

Protrusion amount

25mm

Detector

Acquisition device

Circle grating

Circumference of sampling points

8192 points

Sensor type

Inductive Sensor

Sensor range

±300μm

Sensor resolution

0.01μm

X raster

RENISHAW grating scale

Z raster

RENISHAW grating scale